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SERVICES â†’ FABRICATION

Star Photonics® team can fabricate a prototype of your device in Silicon platform. We are licensed to work, mainly, at various facilities in Israel (such as TAU Nano Center and BINA) and are experienced to manufacture a prototype at standards higher than academic level. We deal mainly with chip architecture comprising of optical devices (cm-to-nm range), micro-electronics devices and electro-optical (integrated electronics with optics) devices. We can also do standard packaging of the chip including input/output ports.

 

Our expertise is in standard photolithography and Electron Beam lithography (EBeam). Masks are designed by software such as CleWin© and Raith© editors. This allows fabrication of optical elements at the nanoscale range and microelectronics of shallow junction architecture.

 

Following are some of the elements that we specialize in the Silicon platform:

  • Ring/Racetrack resonators, Fabry-Perot resonators, Photonic Crystal resonators,  Mach-Zehnder Interferometers,

      Y-couplers, Directional Couplers, Tapers and other similar elements of the Integrated Optics family.

  • BRAGG reflectors made of tandem layers or waveguide corrugation (tapered grating).

  • PN/PIN diodes and MOS capacitors.

  • Optical filters and sensors.

  • Electro-optical modulators supporting RF operation (switching rate of 25GHz for regular 50Ω line). 

 

Photonic Crystal

Photonic Crystal

2D Photonic Crystal in Silicon Photonics platform. The device is a nano-structure lattice with holes diameter of 200nm.

Microring Resonator

Microring Resonator

Microring Resonator in Silicon Photonics platform. This device is commonly used as a narrow band filter or as an element of an Electro-Optical modulator. The ring diameter is 18 micron and the waveguide width is 400nm.

Racetrack Resonator

Racetrack Resonator

Micron size Racetrack Resonator in Silicon Photonics platform. This device is commonly used as a narrow band filter or as an element of an Electro-Optical modulator. In this configuration (two bus waveguides) the device can also be used as an Add Drop Filter (ADF). The racetrack perimeter is 100 micron and the coupling gap is 200nm.

Photonic Crystal Resonator

Photonic Crystal Resonator

2D Photonic Crystal Resonator in Silicon Photonics platform. This device is commonly used as a narrow band filter or as an element of an Electro-Optical modulator. It also provides larger FSR than typical resonators such as ring or fabry-perot resonators. The cavity size is 1.5x0.5 micron. It is a nano-structure lattice with holes diameter of 200nm.

Y Coupler, 3dB Optical Splitter

Y Coupler, 3dB Optical Splitter

Y Coupler in Silicon Photonics platform. This device is commonly used as an optical splitter. The coupler splits the optical input power into two equal and separated optical output powers.

Directional Coupler

Directional Coupler

Directional Coupler (DC) in Silicon Photonics platform. This device is commonly used as an optical splitter. The coupler splits the optical input power into two separated optical output powers. The power exchange between the two adjacent waveguides depends mostly on the length of the straight waveguides. It is possible to obtain full power transfer.

Fabrication 7.png

Fabrication 7.png

Micron size Racetrack Resonator in Silicon Photonics platform. This device is commonly used as a narrow band filter or as an element of an Electro-Optical modulator. The racetrack perimeter is 100 micron and the coupling gap is 200nm. The interaction length is 5micron.

Electro-optical circuit

Electro-optical circuit

Add Drop Filter (ADF) Electro-Optical filter circuit in Silicon Photonics platform.

PN and PIN Diodes

PN and PIN Diodes

PN and PIN Silicon Diodes in SOI platform. The intrinsic region length is 3 micron. The diodes are presented at stage prior to annealing process. They are used as an electrical control in an Electro-Optical modulator.

PN and PIN Diodes

PN and PIN Diodes

PN and PIN Silicon Diodes in SOI platform. The intrinsic region length is 5 micron. The diode is presented at stage prior to annealing process. It is used as a test diode for the electrical control in an Electro-Optical modulator.

Fabrication 11

Fabrication 11

Silicon MOS Capacitor in SOI platform. The capacitor supports RF operation around 20 GHz and designed with G-S-G input. It is used as a test capacitor for the electrical control in an Electro-Optical modulator.

Fabrication 12

Fabrication 12

Measurement Tips touch the pads of an electrical circuit driving an Electro-Optical modulator in Silicon Photonics platform.

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